A Multi-Layered Air-Gap Transmission Line Design for CMOS-Compatible Millimeter-Wave ICs
Published in 2021 International Conference on IC Design and Technology (ICICDT), 2021
Keywords—CMOS transmission line, air-gap, monolithic microwave integrated circuits, millimeter wave, dual damascene
Recommended citation: S. Zhang and S. Lam, “A Multi-Layered Air-Gap Transmission Line Design for CMOS-Compatible Millimeter-Wave ICs,” 2021 International Conference on IC Design and Technology (ICICDT), 2021, pp. 1-4, doi: 10.1109/ICICDT51558.2021.9626538.